VSP 80 Screw Vacuum Pump
VSP 80 Screw Vacuum Pump
VSP 80 Screw Vacuum Pump
VSP 80 Screw Vacuum Pump

VSP 80 Screw Vacuum Pump

The VSP 80 Screw Vacuum Pump is an intelligent and compact screw vacuum pump that can be used in many applications due to its reliability, multiple control methods, low operation and maintenance costs, cleanliness, corrosion resistance, and other advantages. With its water-cooled potting motors, multiple blowing paths, gas and liquid monitoring, as well as frequency control, it is widely used in the semiconductor, lithium-ion battery, photovoltaic and other industries, and can also be used as a backing pump for Roots pumps and the like.
Features of VSP 80 Screw Vacuum Pump
Features of VSP 80 Screw Vacuum Pump

Variable pitch rotor

Customized type line with variable pitch, better resistance to water vapor and corrosion, lower power consumption.


Water-cooled potting motor

Coaxial design of motor and pump body, anti-corrosion design, higher efficiency and reliability. Sealed water-cooled potting motor design, with sealing, insulation and vibration damping; more stable and durable.


Compact vector control inverter

Compact vector control, with an operating environment of 20~40℃, built-in STO/PLC, automatic startup in case of power failure.


TMF thermal flow meter

High-precision, corrosion-resistant thermal flowmeter with real-time feedback of gas flow and safe control of start-stop.


Clamp flow sensor

Real-time display of flow rate and water flow threshold control, to prevent clogging; no loss of water flow, easy maintenance, safety control start-stop.


Pump chamber pressure transmitter (exhaust)

High precision, corrosion-resistant, accurate real-time feedback of the pump chamber pressure to ensure effective process control.

Parameter of VSP 80 Screw Vacuum Pump

Model
VSP80
Peak pumping speedm³/h80
L/ min1330
CFM47
Ultimate vacuumPa1
Torr7.5×10⁻³
mbar1×10⁻²
Gas
purge
Dry nitrogen/ Dry compressed airslm0~190
PressureMpa0.1~0.2
Purge gas Inlet connection
One-touch fitting φ6 tube
Motor ratingkW3
Current at ultimate pressureA2.8
Heavy duty peak currentA4
Control
PID functions

Analogue speed control

Parallel control and monitoring: Digital and Modbus-RTU control

Serial communication: MODBUS-RTU
Inlet DN
KF40
Exhaust DN
KF40
Max water vapor pumping rateg/h800
Weightkg209
Noise leveldB(A)≤65
Operating temperature range ( storage)5~40
Cooling mode
Water cooling
cooling waterMinimum flowL/ min3~7
Temperature15~30
Dimensions(L*W*H)mm989×468×551


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2025-01-16
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